For Immediate Release
December 2, 2008
CONTACT: Kathryn Theodore
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
www.prosysmeg.com
ProSys Expands Radial Power Megasonics Transducer Patent Portfolio to China
CAMPBELL, CA December 2, 2008 – Product Systems, Inc. (ProSys, Inc), the leader in the advancement of Megasonic Process Technology, today announced the expansion of their IP portfolio with the granting of the ProSys Radial Power Megasonics MegPie™ Transducer patent by the Chinese Patent office. ProSys now holds a total of 29 patents for Megasonic Transducer Design, RF Transfer, Radial Uniformity and Megasonic Metrology.
“We look forward to supplying our advanced single wafer Megasonics technology to the growing market in China,” said Mark Beck, Founder and CEO of ProSys.
Since 2003, MegPie™ Transducers have been in use worldwide for Post CMP, Pre-Bond, TS Via, and Residual Cleans as well as Thick Film Develop/Etch and other Megasonic Enhanced Processes.
The MegPie™ Transducer provides a uniform field of acoustic energy to a rotating substrate that can be easily integrated into any OEM’s tool. The MegPie™ can be retrofitted to a variety of standard processing tools in hours.
The MegPie™ Transducer is available in a choice of materials and can be purchased in standard sizes for Megasonic enhanced processing of 100mm to 450mm substrates.
About ProSys, Inc.
Founded in 1996, Product Systems Inc. (dba ProSys, Inc) delivers innovative Megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. Manufacturers in the integrated circuit, hard drive, raw silicon, mask, flat panel display and other industries affected by contamination have also turned to ProSys Megasonic cleaning systems to meet their stringent cleaning requirements. With an international presence that has driven the advancement of Megasonic technology, ProSys sets the industry standard when it comes to wet-process critical cleaning system design, engineering and manufacturing. Website: www.prosysmeg.com.
ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.
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