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For Immediate Release
April 27, 2011
CONTACT: Kathryn Theodore
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
www.prosysmeg.com
ProSys Receives Approval for Its Radial Uniformity Patent in Europe
CAMPBELL, California, April 27, 2011 — ProSys Inc., the leader in advancing Megasonic cleaning technology and products, today announced that they have received approval for their radial uniformity patent (MegPie) in the European Union (EU).
ProSys now hold 44 patents for Megasonic transducer design, RF supply, radial uniformity, and Megasonic metrology.
The MegPieTM Transducer provides a uniform field of acoustic energy to a rotating substrate and can be easily integrated into tools from any OEM. The proper dose of acoustic energy applied to the substrate can improve the particle removal efficiency (PRE) and reduce the process time.
About ProSys, Inc.
Founded in 1996, Product Systems Inc. (ProSys) delivers innovative Megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. Manufacturers in the integrated circuit, hard drive, raw silicon, mask, and solar, flat panel display, OLED and other industries affected by contamination have turned to ProSys Megasonic technology to meet their stringent cleaning requirements.
With an international presence, ProSys has driven the advancement of Megasonic technology and sets the industry standard when it comes to the design, engineering, and manufacturing of wet-process critical-cleaning systems.
ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com. |
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