ProSys - Custom MegPie

Custom MegPie Megasonic Transducers

ProSys offers custom sizes of our single-wafer Megasonic stainless steel transducer for megasonic cleaning and sonochemical processes that do not require strong acids or bases. The transducer applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve the process efficiency and lower the process time. The MegPie is easy to retrofit to your single substrate processing tool.

•	The 316 stainless steel resonator is compatible with solvents

•	Patented crystal bond to the resonator

•	Patented RF connection to the crystal

•	Redundant internal RTP temperature monitoring

•	Custom sizes available

•	Uniform direct acoustic energy applied to the process

•	Increased process efficiency

•	Reduced process time

•	Reduced process chemistry usage

•	No moving parts, no consumables

•	Replaces brushes and nozzles

•	• Power density: 0.05 – 2.0 Watts/cm2

•	• Operating frequencies available: 400 kHz to 3 MhZ

•	• Mounting height: 0.02”– 0.14” (0.5mm – 3.5mm)

•	• Process fluid temperature: 15°C – 60°C

•	Process fluid required depends on the substrate size and RPM: 0.5 – 3.0 lpm

•	• Operating RPM: 1 – 100

•	• Nitrogen or CDA purge: 10 lpm

•	• Mounting with 3 x M6 female threaded bosses

•	• Use with IMPulse RF electronics

•	Post-CMP cleaning	•	LIGA process

•	TSV processing	•	Mask cleaning

•	Pre-SOIC bond cleaning	•	Etch assist

•	SU-8 develop	•	Plating pre-cleaning

•	Lift off	•	Pre-plating bubble removal

•	Resist strip	•	Post-laser cleaning

Quick Response

Technical Information

Specifications

Processes Supported

Product Note
with technical specifications and drawings (PDF)