ProSys offers a range of MegPie megasonic transducers to address the cleaning needs of your contamination-sensitive products. The MegPie megasonic transducers apply a uniform dose of acoustic energy to a rotating substrate. Benefits include improvee process efficiency and reduced process time.

450mm MegPie Megasonic Transducer


The ProSys 450mm MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing of 450mm wafers. (more)

Dual Zone MegPie Megasonic Transducer


The Dual Zone MegPie is a single wafer Megasonic transducer for cleaning and sonochemical processing of multiple substrate sizes in one chamber. (more)

Dual Zone MegPie 300/450 Megasonic Transducer


The ProSys Dual Zone MegPie 300/450 is a single-wafer Megasonic transducer for cleaning and sonochemical processing of a 300mm and 450mm substrate in one chamber. (more)

Sapphire MegPie Megasonic Transducer


The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. (more)

Stainless Steel MegPie Megasonic Transducer


The Stainless Steel MegPie is a single-wafer Megasonic stainless steel transducer for cleaning and sonochemical processing that does not require strong acids or bases. (more)

Custom MegPie Megasonic Transducer


ProSys offers custom sizes of our MegPie single-wafer Megasonic stainless-steel transducer, suitable for cleaning and sonochemical processing that do not require strong acids or bases. (more)